Mesin pengeluaran otomatis penuh tingkat wafer yang kompatibel dengan EFEM FAD5100S-WH
ATAS ＞ Peralatan pelapisan sepenuhnya otomatis ＞ Peralatan Pelapis ＞ Mesin pengeluaran otomatis penuh tingkat wafer yang kompatibel dengan EFEM FAD5100S-WH
/produk/mesin-pengeluaran-otomatis-penuh/semikonduktorMesin pengeluaran otomatis penuh tingkat wafer yang kompatibel dengan EFEM FAD5100S-WH
Solusi manajemen wafer presisi tinggi
Perangkat lunak penyelarasan wafer memetakan ulang hasil produksi dan pemeriksaan fillet (sesuai SECS/GEM)
・ Pelapisan berkecepatan tinggi dengan operasi terus menerus dan tanpa henti
・ Penyelarasan kecepatan tinggi dengan operasi berkelanjutan dan tanpa henti:
Fungsi Mu SKY Capture
・ Kontrol volume aplikasi otomatis: Fungsi DVM
・ Membentuk pola pelapisan "garis daun" yang ideal untuk menghindari rongga: Fungsi MCD [PAT.P]
・ Cegah cacat massal sebelum terjadi: Fungsi AFC
・Dilengkapi dengan fungsi pemetaan wafer
・Produksi sepenuhnya otomatis dimungkinkan saat terhubung ke EFEM
・Kompatibel dengan wafer dan FOUP
・Fungsi pemetaan wafer
・Pemetaan ulang hasil (kompatibel dengan SECSGEM) ※pilihan
・ Penyelarasan kecepatan tinggi dengan operasi berkelanjutan dan tanpa henti:
Fungsi Mu SKY Capture
・ Kontrol volume aplikasi otomatis: Fungsi DVM
・ Membentuk pola pelapisan "garis daun" yang ideal untuk menghindari rongga: Fungsi MCD [PAT.P]
・ Cegah cacat massal sebelum terjadi: Fungsi AFC
・Dilengkapi dengan fungsi pemetaan wafer
・Produksi sepenuhnya otomatis dimungkinkan saat terhubung ke EFEM
・Kompatibel dengan wafer dan FOUP
・Fungsi pemetaan wafer
・Pemetaan ulang hasil (kompatibel dengan SECSGEM) ※pilihan
Apa itu EFEM (Equipment Front End Module)?
EFEM adalah perangkat modular yang memuat dan membongkar wafer. Fungsinya adalah mengeluarkan wafer secara otomatis dari wadah yang disebut FOUP (Front Opening Unified Pods) atau kaset wafer yang menyimpannya, dan mengangkutnya ke peralatan proses dengan tetap menjaga standar ruang bersih.
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SPESIFIKASI
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nama
Mesin pengeluaran level wafer otomatis penuh FAD5100S-WH
Model
FAD5100S-WH
Metode Kontrol
Kontrol PC/PLC (sesuai SMEMA)
Benda kerja yang berlaku
Wafer 12", wafer 8"
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Perangkat Lunak Katalog
unduh
Untuk mengunduh, Anda harus menjadi anggota situs ini.
Jika Anda belum terdaftar sebagai anggota,
Setelah mendaftar sebagai anggota di sini,
Anda dapat mengunduhnya.
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Melalui telepon
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Dari formulir
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